Item Details

Photomask and X-Ray Mask Technology III [electronic resource]: 18-19 April, 1996, Kawasaki City, Kanagawa, Japan

Hideo Yoshihara, editor ; sponsored by Photomask Japan, BACUS, SPIE--the International Society for Optical Engineering
Format
EBook; Book; Online
Published
Bellingham, Wash. : SPIE, c1996.
Language
English
Series
Proceedings / SPIE — the International Society for Optical Engineering
Proceedings of SPIE — the International Society for Optical Engineering
ISBN
0819421790
Description
Mode of access: World wide Web.
Notes
Includes bibliographic references and index.
Series Statement
Proceedings / SPIE--the International Society for Optical Engineering ; v. 2793
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2793
Logo for Copyright Not EvaluatedCopyright Not Evaluated
Technical Details
  • Access in Virgo Classic

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