Item Details

Plasma Electronics: Applications in Microelectronic Device Fabrication

T. Makabe, Z. Petrović
Format
Book
Published
New York : Taylor & Francis, 2006.
Language
English
Series
Series in Plasma Physics
ISBN
0750309768
Description
339 p. : ill. ; 25 cm.
Notes
Includes bibliographical references and index.
Technical Details

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