Item Details

Optical Inspection of Microsystems [electronic resource]

edited by Wolfgang Osten
Format
EBook; Book; Online
Published
Boca Raton, FL : CRC/Taylor & Francis, c2007.
Language
English
Series
Optical Science and Engineering
Optical Science and Engineering (CRC Press)
ISBN
0849336821 (alk. paper), 9780849336829
Description
Mode of access: World wide Web.
Notes
Includes bibliographical references and index.
Series Statement
Optical science and engineering ; 109
Optical science and engineering (CRC Press) ; 109
Logo for Copyright Not EvaluatedCopyright Not Evaluated
Technical Details
  • Access in Virgo Classic

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    a| Microelectromechanical systems x| Inspection.
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    a| Quality control x| Optical methods.
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    a| Optical measurements.
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