Item Details

Optical Micro- and Nanometrology V [electronic resource]: 15-17 April 2014, Brussels, Belgium

Christophe Gorecki, Anand Krishna Asundi, Wolfgang Osten, editors
Format
EBook; Book; Online
Published
Bellingham, Washington : SPIE, [2014]
Language
English
Variant Title
Optical micro- and nanometrology 5
Optical micro- and nanometrology five
Series
Proceedings of SPIE
ISBN
9781628410808 (paperback), 1628410809 (paperback)
Description
Mode of access: World wide Web.
Notes
Includes bibliographical references and author index.
Series Statement
Proceedings of SPIE, 0277-786X ; volume 9132
Logo for Copyright Not EvaluatedCopyright Not Evaluated
Technical Details
  • Access in Virgo Classic

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