Item Details

Print View

Plasma Electronics [electronic resource]: Applications in Microelectronic Device Fabrication

Toshiaki Makabe, Zoran Lj. Petrovic
Format
EBook; Book; Online
Published
Boca Raton : CRC Press, Taylor & Francis Group, [2015]
Edition
Second edition
Language
English
ISBN
9781482222050 (hardcover : alk. paper)
Description
Mode of access: World wide Web.
Notes
Includes bibliographical references and index.
Copyright Not EvaluatedCopyright Not Evaluated
Technical Details
  • Access in Virgo Classic
  • Staff View

    LEADER 01199cam a2200337 i 4500
    001 u7213080
    003 SIRSI
    005 20171011120511.0
    006 m d
    007 cr n
    008 140804s2015 flua sb 001 0 eng d
    010
      
      
    a| 2014016456
    020
      
      
    a| 9781482222050 (hardcover : alk. paper)
    035
      
      
    a| (WaSeSS)ssj0001346568
    040
      
      
    a| OU/DLC b| eng c| OU d| DLC d| WaSeSS
    042
      
      
    a| pcc
    050
    0
    0
    a| TA2020 b| .M35 2015
    082
    0
    0
    a| 621.044 2| 23
    100
    1
      
    a| Makabe, T. q| (Toshiaki)
    245
    1
    0
    a| Plasma electronics h| [electronic resource] : b| applications in microelectronic device fabrication / c| Toshiaki Makabe, Zoran Lj. Petrovic.
    250
      
      
    a| Second edition.
    260
      
      
    a| Boca Raton : b| CRC Press, Taylor & Francis Group, c| [2015]
    504
      
      
    a| Includes bibliographical references and index.
    538
      
      
    a| Mode of access: World wide Web.
    650
      
    0
    a| Plasma engineering.
    655
      
    0
    a| Electronic books.
    700
    1
      
    a| Petrović, Z.
    710
    2
      
    a| ENGnetBASE
    856
    4
    0
    u| http://RE5QY4SB7X.search.serialssolutions.com/?V=1.0&L=RE5QY4SB7X&S=JCs&C=TC0001346568&T=marc
    596
      
      
    a| 1
    999
      
      
    a| TA2020 .M35 2015 w| LCPER i| 7213080-1001 l| INTERNET m| UVA-LIB t| INTERNET
▾See more
▴See less

Availability

Google Preview

Google Books Preview

Read Online