Item Details

Surface Scattering and Diffraction for Advanced Metrology [electronic resource]: 1 August 2001, San Diego, USA

Zu-Han Gu, Alexei A. Maradudin, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering
Format
EBook; Book; Online
Published
Bellingham, Wash., USA : SPIE, c2001.
Language
English
Series
SPIE Proceedings Series
Proceedings of SPIE — the International Society for Optical Engineering
ISBN
0819441619
Description
Mode of access: World wide Web.
Notes
Includes bibliographical references and index.
Series Statement
SPIE proceedings series ; v. 4447
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4447
Logo for Copyright Not EvaluatedCopyright Not Evaluated
Technical Details
  • Access in Virgo Classic

  • LEADER 01686nam a22004097a 4500
    001 u6776342
    003 SIRSI
    005 20160608063142.0
    006 m d
    007 cr n
    008 020125s2001 waua sb 101 0 eng d
    010
      
      
    a| 2002265497
    020
      
      
    a| 0819441619
    035
      
      
    a| (WaSeSS)ssj0001234192
    040
      
      
    a| CUS c| CUS d| DLC d| WaSeSS
    042
      
      
    a| lccopycat
    050
    0
    0
    a| TA418.7 b| .S928 2001
    082
    0
    0
    a| 681/.25 2| 21
    245
    0
    0
    a| Surface scattering and diffraction for advanced metrology h| [electronic resource] : b| 1 August 2001, San Diego, USA / c| Zu-Han Gu, Alexei A. Maradudin, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
    260
      
      
    a| Bellingham, Wash., USA : b| SPIE, c| c2001.
    490
    1
      
    a| SPIE proceedings series ; v| v. 4447
    504
      
      
    a| Includes bibliographical references and index.
    538
      
      
    a| Mode of access: World wide Web.
    650
      
    0
    a| Surface roughness x| Measurement v| Congresses.
    650
      
    0
    a| Diffractive scattering v| Congresses.
    650
      
    0
    a| Optical measurements v| Congresses.
    650
      
    0
    a| Scattering (Physics) v| Congresses.
    650
      
    0
    a| Metrology v| Congresses.
    655
      
    0
    a| Electronic books.
    700
    1
      
    a| Gu, Zu-Han.
    700
    1
      
    a| Maradudin, Alexei A., d| 1931-
    710
    2
      
    a| Society of Photo-optical Instrumentation Engineers.
    710
    2
      
    a| SPIE Conference Proceedings by volume
    830
      
    0
    a| Proceedings of SPIE--the International Society for Optical Engineering ; v| v. 4447.
    856
    4
    0
    u| http://RE5QY4SB7X.search.serialssolutions.com/?V=1.0&L=RE5QY4SB7X&S=JCs&C=TC0001234192&T=marc
    596
      
      
    a| 1
    999
      
      
    a| XX(6776342.1) w| WEB i| 6776342-1001 l| INTERNET m| UVA-LIB t| INTERNET

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