Item Details

Optical Microlithography XVI [electronic resource]: 25-28 February 2003, Santa Clara, California, USA

Anthony Yen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH
Format
EBook; Book; Online
Published
Bellingham, Wash., USA : SPIE, c2003.
Language
English
Variant Title
Optical microlithography sixteen
Optical Microlithography 16
Series
SPIE Proceedings Series
Proceedings of SPIE — the International Society for Optical Engineering
ISBN
0819448451
Description
Mode of access: World wide Web.
Notes
Includes bibliographical references and index.
Series Statement
SPIE proceedings series, 0277-786X ; v. 5040
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5040
Logo for Copyright Not EvaluatedCopyright Not Evaluated
Technical Details
  • Access in Virgo Classic

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