Item Details

Optical Microlithography XIV [electronic resource]: 27 February-2 March, 2001, Santa Clara, [California], USA

Christopher J. Progler, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH
Format
EBook; Book; Online
Published
Bellingham, Wash. : SPIE, c2001.
Language
English
Variant Title
Optical microlithography fourteen
Series
SPIE Proceedings Series, 0277-786X
Proceedings of SPIE — the International Society for Optical Engineering
ISBN
0819440329
Description
Mode of access: World wide Web.
Notes
Includes bibliographical references and index.
Series Statement
SPIE proceedings series, 0277-786X ; v. 4346
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4346
Logo for Copyright Not EvaluatedCopyright Not Evaluated
Technical Details
  • Access in Virgo Classic

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