Item Details

Optical Microlithography and Metrology for Microcircuit Fabrication [electronic resource]: Proceedings, ECO2, 27-28 April, 1989, Paris, France

Michel J. Lacombat, Steve Wittekoek, chairs/editors
Format
EBook; Book; Online
Published
Bellingham, Wash., USA : SPIE, c1989.
Language
English
Series
SPIE Proceedings Series
Proceedings of SPIE — the International Society for Optical Engineering
ISBN
0819401749
Description
Mode of access: World wide Web.
Notes
  • "The Congress of EPS--European Physical Society, Europtica--the European Federation for Applied Optics, SPIE--the International Society for Optical Engineering; cooperating organizations, ANRT--Association nationale de la recherche technique ... [et al.]."
  • Includes bibliographical references and index.
Series Statement
SPIE proceedings series ; v. 1138
Proceedings of SPIE--the International Society for Optical Engineering ; v. 1138
Logo for Copyright Not EvaluatedCopyright Not Evaluated
Technical Details
  • Access in Virgo Classic

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