Item Details

Optical Micro- and Nanometrology in Microsystems Technology II [electronic resource]: 8-10 April 2008, Strasbourg, France

Christophe Gorecki, Anand K. Asundi, Wolfgang Osten, editors ; sponsored by SPIE Europe ; cosponsored by Alsace international (France) ... [et al.] ; cooperating organizations, AFOP--Association française des industries de l'optique et de la photonique (France) ... [et al.]
Format
EBook; Book; Online
Published
Bellingham, Wash. : SPIE, 2008.
Language
English
Series
Proceedings of SPIE
Proceedings of SPIE — the International Society for Optical Engineering
ISBN
9780819471932 (pbk.), 0819471933 (pbk.)
Description
Mode of access: World wide Web.
Notes
Includes bibliographical references and author index.
Series Statement
Proceedings of SPIE, 0277-786X ; v. 6995
Proceedings of SPIE--the International Society for Optical Engineering ; v. 6995
Logo for Copyright Not EvaluatedCopyright Not Evaluated
Technical Details
  • Access in Virgo Classic

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