Item Details

Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II [electronic resource]: 2-3 August, 2001, San Diego, USA

Angela Duparré, Bhanwar Singh, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering
Format
EBook; Book; Online
Published
Bellingham, Wash., USA : SPIE, c2001.
Language
English
Series
SPIE Proceedings Series
Proceedings of SPIE — the International Society for Optical Engineering
ISBN
0819441635 (pbk.)
Description
Mode of access: World wide Web.
Notes
Includes bibliographic references and author index.
Series Statement
SPIE proceedings series, 0277-786X ; v. 4449
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4449
Logo for Copyright Not EvaluatedCopyright Not Evaluated
Technical Details
  • Access in Virgo Classic

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