Item Details

Metrology-Based Control for Micro-Manufacturing [electronic resource]: 24-25 January 2001, San Jose [Calif.], USA

Kenneth W. Tobin, Fred Lakhani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering
Format
EBook; Book; Online
Published
Bellingham, Wash. : SPIE, c2001.
Language
English
Series
SPIE Proceedings Series
Proceedings of SPIE — the International Society for Optical Engineering
ISBN
0819439533
Description
Mode of access: World wide Web.
Notes
Includes bibliographical references and index.
Series Statement
SPIE proceedings series ; v. 4275
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4275
Logo for Copyright Not EvaluatedCopyright Not Evaluated
Technical Details
  • Access in Virgo Classic

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