Item Details

In-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturing [electronic resource]: 19-21 May, 1999, Edinburgh, Scotland

Kostas Amberiadis ... [et al.], chairs/editors ; sponsored by EOS--European Optical Society, SPIE--the International Society for Optical Engineering, [and] Commission of the European Communities, Directorate General for Science, Research, and Development ; cosponsored by Scottish Enterprise [and] Sira Technology Centre (UK) ; cooperating organiz...
Format
EBook; Book; Online
Published
Bellingham, Wash., USA : SPIE, c1999.
Language
English
Series
Proceedings EurOpt Series
Proceedings / SPIE — the International Society for Optical Engineering
Proceedings of SPIE — the International Society for Optical Engineering
ISBN
0819432237
Description
Mode of access: World wide Web.
Notes
Includes bibliographic references and author index.
Series Statement
Proceedings / SPIE--the International Society for Optical Engineering ; v. 3743
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3743
Logo for Copyright Not EvaluatedCopyright Not Evaluated
Technical Details
  • Access in Virgo Classic

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