Item Details

Design for Manufacturability Through Design-Process Integration II [electronic resource]: 28-29 February 2008, San Jose, California, USA

Vivek K. Singh, Michael L. Rieger, editors ; sponsored by SPIE ; cooperating organization, SEMATECH (USA)
Format
EBook; Book; Online
Published
Bellingham, Wash. : SPIE, c2008.
Language
English
Series
Proceedings of SPIE
Proceedings of SPIE — the International Society for Optical Engineering
ISBN
9780819471109, 0819471100
Description
Mode of access: World wide Web.
Notes
Includes bibliographical references and author index.
Series Statement
Proceedings of SPIE, 0277-786X ; v. 6925
Proceedings of SPIE--the International Society for Optical Engineering ; v. 6925
Logo for Copyright Not EvaluatedCopyright Not Evaluated
Technical Details
  • Access in Virgo Classic

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