Item Details

Design and Process Integration for Microelectronic Manufacturing IV [electronic resource]: 23-24 February, 2006, San Jose, California, USA

Alfred K.K. Wong, Vivek, K. Singh, chairs/editors ; cooperating organization, SEMATECH, Inc (USA) ; sponsored and published by SPIE--the International Society for Optical Engineering
Format
EBook; Book; Online
Published
Bellingham, Wash. : SPIE, c2006.
Language
English
Series
Proceedings of SPIE
Proceedings of SPIE — the International Society for Optical Engineering
ISBN
0819461997
Description
Mode of access: World wide Web.
Notes
Includes bibliographical references and author index.
Series Statement
Proceedings of SPIE, 0277-786X ; v. 6156
Proceedings of SPIE--the International Society for Optical Engineering ; v. 6156
Logo for Copyright Not EvaluatedCopyright Not Evaluated
Technical Details
  • Access in Virgo Classic

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    a| Integrated circuits x| Design and construction v| Congresses.
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