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EUV Lithography [electronic resource]

Vivek Bakshi, editor
Format
EBook; Book; Online
Published
Bellingham, Wash. : SPIE Press ; Hoboken, NJ : John Wiley, c2009.
Language
English
ISBN
9780819469649 (SPIE), 0819469645 (SPIE), 9780470471555 (Wiley), 0470471557 (Wiley)
Description
Mode of access: World wide Web.
Notes
Includes bibliographical references and index.
Copyright Not EvaluatedCopyright Not Evaluated
Technical Details
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    a| Ultraviolet radiation x| Industrial applications.
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    a| Photolithography.
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    a| Optical coatings.
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