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Characterization and Metrology for ULSI Technology [electronic resource]

editors, David G. Seiler ... [et al.]
Format
EBook; Book; Online
Published
Melville, N.Y. : American Institute of Physics, 2005.
Language
English
Series
AIP conference proceedings
ISBN
0735402779
Description
Mode of access: World wide Web.
Notes
Includes bibliographical references and index.
Series Statement
AIP conference proceedings, 0094-243X ; v. 788
AIP conference proceedings no.788
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