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Chemical Vapour Deposition [electronic resource]: Precursors, Processes and Applications

edited by Anthony C. Jones, Michael L. Hitchman
Format
EBook; Book; Online
Published
Cambridge, UK : Royal Society of Chemistry, c2009.
Language
English
Variant Title
Chemical vapor deposition
ISBN
9780854044658 (hbk.), 0854044655 (hbk.)
Description
Mode of access: World wide Web.
Notes
Includes bibliographical references and index.
Technical Details
  • Access in Virgo Classic
  • Staff View

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