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Handbook of Thin Film Deposition [electronic resource]: Techniques, Processes, and Technologies

edited by Krishna Seshan
Format
EBook; Book; Online
Published
Waltham [Mass.] : William Andrew, 2012
Edition
3rd ed
Language
English
ISBN
1437778747 (electronic bk.), 9781437778748 (electronic bk.), 9781437778731 (hbk.), 1437778739 (hbk.)
Description
1 online resource (xviii, 392 p.)
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