Item Details

Handbook of Thin Film Deposition [electronic resource]: Techniques, Processes, and Technologies

edited by Krishna Seshan
Format
EBook; Book; Online
Published
Waltham [Mass.] : William Andrew, 2012
Edition
3rd ed
Language
English
ISBN
1437778747 (electronic bk.), 9781437778748 (electronic bk.), 9781437778731 (hbk.), 1437778739 (hbk.)
Description
1 online resource (xviii, 392 p.)
Logo for Copyright Not EvaluatedCopyright Not Evaluated
Technical Details
  • Access in Virgo Classic

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    a| Thin film devices x| Design and construction v| Handbooks, manuals, etc.
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    a| Thin films.
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