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On the Throughput Optimization of Electron Beam Lithography Systems [electronic resource]

door Elvira Hendrika Mulder
Format
Thesis/Dissertation; Online
Published
1991.
Language
English
Access Restriction
Available to Center for Research Libraries (CRL) members only. Consult CRL for membership information: http://www.crl.edu/content/members/memberListAlpha.asp
Description
1 online resource (1 v. (various pagings)) : ill.
Dissertation Note
Thesis (doctoral)--Technische Universiteit Delft, 1991.
Notes
  • Summary in Dutch.
  • "Stellingen" ([1] folded leaf) inserted.
  • Vita.
  • Includes bibliographical references (p. BR-1-BR-15)
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  • Access in Virgo Classic
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