Item Details

Print View

On the Throughput Optimization of Electron Beam Lithography Systems [electronic resource]

door Elvira Hendrika Mulder
Format
Thesis/Dissertation; Online
Published
1991.
Language
English
Access Restriction
Available to Center for Research Libraries (CRL) members only. Consult CRL for membership information: http://www.crl.edu/content/members/memberListAlpha.asp
Description
1 online resource (1 v. (various pagings)) : ill.
Dissertation Note
Thesis (doctoral)--Technische Universiteit Delft, 1991.
Notes
  • Summary in Dutch.
  • "Stellingen" ([1] folded leaf) inserted.
  • Vita.
  • Includes bibliographical references (p. BR-1-BR-15)
Copyright Not EvaluatedCopyright Not Evaluated
Technical Details
  • Access in Virgo Classic
  • Staff View

    LEADER 01576ntm a2200361Ka 4500
    001 u5759490
    003 SIRSI
    005 20120507010649.0
    006 m o d
    007 cr |||||||||||
    008 120507s1991 ne a ob 000 0 eng d
    035
      
      
    a| (OCoLC)793206483
    040
      
      
    a| CRL c| CRL
    049
      
      
    a| CRLL
    100
    1
      
    a| Mulder, Elvira Hendrika, d| 1964-
    245
    1
    0
    a| On the throughput optimization of electron beam lithography systems h| [electronic resource] / c| door Elvira Hendrika Mulder.
    260
      
      
    c| 1991.
    300
      
      
    a| 1 online resource (1 v. (various pagings)) : b| ill.
    502
      
      
    a| Thesis (doctoral)--Technische Universiteit Delft, 1991.
    500
      
      
    a| Summary in Dutch.
    500
      
      
    a| "Stellingen" ([1] folded leaf) inserted.
    504
      
      
    a| Includes bibliographical references (p. BR-1-BR-15)
    500
      
      
    a| Vita.
    506
    1
      
    a| Available to Center for Research Libraries (CRL) members only. Consult CRL for membership information: u| http://www.crl.edu/content/members/memberListAlpha.asp
    650
      
    0
    a| Lithography, Electron beam.
    710
    2
      
    a| Technische Universiteit Delft.
    776
    0
    8
    i| Print version: a| Mulder, Elvira Hendrika, 1964- t| On the throughput optimization of electron beam lithography systems. d| 1991 w| (OCoLC)26868069.
    856
    4
    0
    3| Center for Research Libraries u| http://proxy01.its.virginia.edu/login?url=https://dds.crl.edu/crldelivery/6878
    596
      
      
    a| 1
    999
      
      
    a| XX(5759490.1) w| WEB i| 5759490-1001 l| INTERNET m| UVA-LIB t| INTERNET
▾See more
▴See less

Availability

Google Preview

Google Books Preview