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Growth Kinetics, Electrical Characterization and Reliability Study of Sub-5 Nm Gate Dielectrics [electronic resource]

Tanya Nigam
Format
EBook; Thesis/Dissertation; Book; Online
Published
1999.
Language
English
Access Restriction
Available to Center for Research Libraries (CRL) members only. Consult CRL for membership information: http://www.crl.edu/content/members/memberListAlpha.asp
Description
1 online resource (181 p.)
Dissertation Note
Thesis (doctoral)--Katholieke Universiteit te Leuven (1970- ), 1999.
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