Item Details

Microelectromechanical Systems--Materials and Devices II: Symposium Held December 1-2, 2008, Boston, Massachusetts, U.S.A.

editors, Srikar Vengallatore ... [et al.]
Format
Book
Published
Warrendale, Pa. : Materials Research Society, c2009.
Language
English
Series
Materials Research Society Symposium Proceedings
Materials Research Society Symposia Proceedings
ISBN
9781605111117, 1605111112
Description
xi, 247 p. : ill. ; 24 cm.
Notes
  • "This proceedings volume reports on research presented at [...] Symposium GG, 'Microelectromechanical Systems--Materials and Devices II,' which was held December 1-2 at the 2008 MRS Fall Meeting in Boston, Massachusetts"--Preface, p. xi.
  • Includes bibliographical references and indexes.
Series Statement
Materials Research Society symposium proceedings, 1946-4274 ; v. 1139
Materials Research Society symposia proceedings v. 1139
Technical Details
  • Access in Virgo Classic

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    a| Thin films v| Congresses.
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