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A Process to Produce Fine Line Metallic Collection Patterns on Semiconductors Devices [microform]

Jet Propulsion Laboratory (US); United States National Aeronautics and Space Administration
Format
Book; Government Document; Microform
Published
[Washington, D.C. : National Aeronautics and Space Administration, 1984]
Language
English
Series
NASA Case
SuDoc Number
NAS 1.71:NPO-16413-1-CU
Description
1 v.
Notes
  • Title from prelim. p. [2].
  • Distributed to depository libraries in microfiche; shipping list no. not available.
  • "[Date]: November 19, 1984; filing date: 12/20/84."
  • Inventor: Brian D. Gallagher; contractor: Jet Propulsion Laboratory.
Reproduction Notes
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1984] 1 microfiche GovDoc Classification No. on header: NAS 1.71:NPO-16413-1.
Series Statement
NASA case ; NPO-16413-1-CU
Technical Details
  • Access in Virgo Classic
  • Staff View

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    a| Laser beams.
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