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Silicon Front-End Junction Formation--Physics and Technology: Symposium Held April 13-15, 2004, San Francisco, California, U.S.A.

editors: Peter Pichler ... [et al.]
Format
Book
Published
Warrendale, Pa. : Materials Research Society, c2004.
Language
English
Series
Materials Research Society Symposium Proceedings
Materials Research Society Symposia Proceedings
ISBN
1558997601
Description
xvi, 494 p. : ill. ; 24 cm.
Notes
  • "... Symposium C, "Silicon Front-End Junction Formation--Physics and Technology," was held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California."--p. xv.
  • Includes bibliographical references and indexes.
Series Statement
Materials Research Society symposium proceedings ; v. 810
Materials Research Society symposia proceedings v. 810
Technical Details
  • Access in Virgo Classic
  • Staff View

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    a| Silicon front-end junction formation--physics and technology : b| symposium held April 13-15, 2004, San Francisco, California, U.S.A. / c| editors: Peter Pichler ... [et al.].
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    a| xvi, 494 p. : b| ill. ; c| 24 cm.
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    a| Materials Research Society symposium proceedings ; v| v. 810
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    a| "... Symposium C, "Silicon Front-End Junction Formation--Physics and Technology," was held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California."--p. xv.
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