Item Details

Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March 2003

editors, David G. Seiler ... [et al.]
Format
EBook; Book; Computer Resource; Online
Published
Melville, N.Y. : American Institute of Physics, 2003.
Language
English
Series
AIP Conference Proceedings
ISBN
0735401527 (set)
Description
xviii, 818 p. : ill. ; 28 cm. + 1 CD-ROM (4 3/4 in.)
Notes
  • "The 2003 International Conference on Characterization and Metrology for ULSI Technology was held at the J.J. Pickle Research Campus, University of Texas, Austin, TX, from March 24 through March 28, 2003"--pref.
  • Accompanying computer disc contains full text from the book.
  • Includes bibliographical references and index.
Series Statement
AIP Conference Proceedings ; vol. 683
AIP conference proceedings no. 683
Logo for Copyright Not EvaluatedCopyright Not Evaluated
Technical Details
  • Access in Virgo Classic

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