Item Details

Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics--2003: Symposium Held April 21-25, 2003, San Francisco, California, U.S.A

editors: Andrew J. McKerroe ... [et al.]
Format
Book
Published
Warrendale, Pa. : Materials Research Society, c2003.
Language
English
Series
Materials Research Society Symposium Proceedings
Materials Research Society Symposia Proceedings
ISBN
1558997032
Description
xv, 515 p. : ill. ; 24 cm.
Notes
  • "Symposium E, 'Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics,' was held April 23-25 at the 2003 MRS Spring Meeting in San Francisco, California."--p. xv.
  • Includes bibliographical references and indexes.
Series Statement
Materials Research Society symposium proceedings ; v. 766
Materials Research Society symposia proceedings v. 766
Technical Details
  • Access in Virgo Classic

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    a| Materials, technology and reliability for advanced interconnects and low-k dielectrics--2003 : b| symposium held April 21-25, 2003, San Francisco, California, U.S.A / c| editors: Andrew J. McKerroe ... [et al.].
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    a| Warrendale, Pa. : b| Materials Research Society, c| c2003.
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    a| xv, 515 p. : b| ill. ; c| 24 cm.
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    a| Materials Research Society symposium proceedings ; v| v. 766
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    a| "Symposium E, 'Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics,' was held April 23-25 at the 2003 MRS Spring Meeting in San Francisco, California."--p. xv.
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    a| Includes bibliographical references and indexes.
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    a| Semiconductors x| Materials v| Congresses.
    650
      
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    a| Semiconductors x| Junctions v| Congresses.
    650
      
    0
    a| Dielectric films v| Congresses.
    650
      
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    a| Integrated circuits x| Materials v| Congresses.
    650
      
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    a| Integrated circuits x| Reliability v| Congresses.
    700
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    a| McKerrow, Andrew J.
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    a| Symposim on Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics d| (2003 : c| San Francisco, Calif.)
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    a| Materials Research Society symposia proceedings v| v. 766.
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