Item Details

Materials and Device Characterization in Micromachining

Society of Photo-Optical Instrumentation Engineers; Semiconductor Equipment and Materials International
Format
Journal/Magazine
Published
Bellingham, Wash. : SPIE, 1998-
Language
English
Series
SPIE Proceedings Series
Proceedings of SPIE — the International Society for Optical Engineering
Description
v. : ill. ; 28 cm.
Local Notes
SCIENCE & ENGINEERING: SUBSCRIPTION CANCELLED AT END OF 2000
Publication History
21-22 Sept. 1998-
Technical Details
  • Access in Virgo Classic

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Stacks
no.3 (2000)
Library Location Map Availability Call Number
Brown Science and Engineering Stacks N/A Available