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Contributing to an Automated Defect Analysis System at Dominion Semiconductor by Using Statistical Methods to Detect the Presence of Defect Clustering on a Wafer

Bridgman, Jeffrey Scott
Format
Book
Published
2001.
Language
English
Notes
Systems Engineering
Technical Details
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    a| Bridgman, Jeffrey Scott
    245
      
      
    a| Contributing to an automated defect analysis system at dominion semiconductor by using statistical methods to detect the presence of defect clustering on a wafer.
    260
      
      
    c| 2001.
    500
      
      
    a| Systems Engineering
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    a| 14
    999
      
      
    a| SE 200117 w| ALPHANUM i| X004381355 l| BY-REQUEST m| IVY t| THESIS-DIS
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