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Characterization and Metrology for ULSI Technology, 2000: International Conference, Gaithersburg, Maryland, 26-29 June 2000

editors, David G. Seiler ... [et al.]
Format
Book
Published
Melville, NY : American Institute of Physics, 2001.
Language
English
Series
AIP Conference Proceedings
ISBN
156396967X (set), 1563969793 (CD-ROM)
Description
xv, 708 p. : ill. ; 28 cm. + 1 computer optical disk (4 3/4 in.)
Notes
  • "The 2000 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology (NIST) from June 26 through June 29, 2000."--Pref.
  • Includes bibliographical references and indexes.
Series Statement
AIP conference proceedings, 0094-243x ; 550
AIP conference proceedings no. 550
Technical Details
  • Access in Virgo Classic
  • Staff View

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