Item Details

Plasma Charging Damage

Kin P. Cheung
Format
Book
Published
London ; New York : Springer, c2001.
Language
English
ISBN
1852331445 (alk. paper)
Description
xii, 346 p. : ill. ; 24 cm.
Notes
Includes bibliographical references and index.
Technical Details
  • Access in Virgo Classic

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    a| 1852331445 (alk. paper)
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    a| Plasma charging damage / c| Kin P. Cheung.
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    a| London ; a| New York : b| Springer, c| c2001.
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    a| xii, 346 p. : b| ill. ; c| 24 cm.
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    a| Includes bibliographical references and index.
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    a| 5
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    a| Semiconductors x| Effect of radiation on.
    650
      
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    a| Metal oxide semiconductors x| Defects.
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    a| Plasma radiation.
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    a| TK7871.85 .C4784 2001 w| LC i| X004476411 l| STACKS m| SCI-ENG t| BOOK

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