Item Details

Evaluation of a Procedure for the Measurement of Thin Film Thickness by X-Ray Reflectivity [microform]

Jeannette Benavides
Format
Book; Government Document; Microform
Published
Greenbelt, Md. : National Aeronautics and Space Administration, Goddard Space Flight Center ; [Springfield, Va. : National Technical Information Service, distributor], 1997.
Language
English
Series
NASA Technical Paper
SuDoc Number
NAS 1.60:3697
Description
1 v.
Notes
Shipping list no.: 99-0723-M.
Reproduction Notes
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1998] 1 microfiche .
Series Statement
NASA technical paper 3697
Technical Details
  • Access in Virgo Classic

  • LEADER 01538nam a22004217a 4500
    001 u2933905
    003 SIRSI
    005 19991028122018.0
    008 991028s1997 mdu b f000 0 eng d
    035
      
      
    a| (Sirsi) tmp97153953
    035
      
      
    a| (OCoLC)42721731
    037
      
      
    a| 19980084724 b| NASA
    040
      
      
    a| GPO c| GPO d| DLC d| MvI
    049
      
      
    a| VAMM
    074
      
      
    a| 0830-H-15 (MF)
    086
    0
      
    a| NAS 1.60:3697
    100
    1
      
    a| Benavides, Jeannette.
    245
    1
    0
    a| Evaluation of a procedure for the measurement of thin film thickness by X-ray reflectivity h| [microform] / c| Jeannette Benavides.
    260
      
      
    a| Greenbelt, Md. : b| National Aeronautics and Space Administration, Goddard Space Flight Center ; a| [Springfield, Va. : b| National Technical Information Service, distributor], c| 1997.
    300
      
      
    a| 1 v.
    440
      
    0
    a| NASA technical paper v| 3697
    500
      
      
    a| Shipping list no.: 99-0723-M.
    533
      
      
    a| Microfiche. b| [Washington, D.C. : c| National Aeronautics and Space Administration, d| 1998] e| 1 microfiche .
    596
      
      
    a| 2
    650
      
    7
    a| Thin films. 2| nasat
    650
      
    7
    a| Film thickness. 2| nasat
    650
      
    7
    a| Silicon dioxide. 2| nasat
    650
      
    7
    a| Solid state devices. 2| nasat
    650
      
    7
    a| Measuring instruments. 2| nasat
    650
      
    7
    a| X rays. 2| nasat
    650
      
    7
    a| Reflectance. 2| nasat
    650
      
    7
    a| X ray diffraction. 2| nasat
    710
    2
      
    a| Goddard Space Flight Center.
    900
      
      
    a| tmp97153953
    999
      
      
    a| NAS 1.60:3697 w| SUDOC i| X005054668 l| 3EAST m| ALDERMAN t| MICROFICHE

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