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Antireflecting-Chromium Linewidth Standard, SRM 473, for Calibration of Optical Microscope Linewidth Measuring Systems [microform]

James E. Potzick
Format
Book; Government Document; Microform
Published
Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; Washington : For sale by the Supt. of Docs., U.S. G.P.O., 1997.
Language
English
Variant Title
Antireflecting chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
Series
NIST Special Publication
Standard Reference Materials
SuDoc Number
C 13.10:260-129
Description
xiii, 23 p. : ill. ; 28 cm.
Notes
  • Distributed to depository libraries in microfiche.
  • Shipping list no.: 98-0086-M.
  • Includes bibliographical references (p. 17-18).
Reproduction Notes
Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., [1997] 1 microfiche : negative.
Series Statement
NIST special publication ; 260-129
Technical Details
  • Access in Virgo Classic
  • Staff View

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    a| (Sirsi) tmp97116108
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    037
      
      
    a| 003-003-03447-9 b| GPO f| paper copy c| $3.25
    040
      
      
    d| GPO d| DLC d| MvI
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    a| 0247 (MF)
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    a| Potzick, James E.
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    a| Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems h| [microform] / c| James E. Potzick.
    246
    2
      
    a| Antireflecting chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
    260
      
      
    a| Gaithersburg, MD : b| U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; a| Washington : b| For sale by the Supt. of Docs., U.S. G.P.O., c| 1997.
    300
      
      
    a| xiii, 23 p. : b| ill. ; c| 28 cm.
    440
      
    0
    a| NIST special publication ; v| 260-129
    440
      
    0
    a| Standard reference materials
    500
      
      
    a| Distributed to depository libraries in microfiche.
    500
      
      
    a| Shipping list no.: 98-0086-M.
    504
      
      
    a| Includes bibliographical references (p. 17-18).
    533
      
      
    a| Microfiche. b| [Washington, D.C.] : c| Supt. of Docs., U.S. G.P.O., d| [1997] e| 1 microfiche : negative.
    596
      
      
    a| 2
    650
      
    0
    a| Microscopes x| Calibration x| Standards.
    650
      
    0
    a| Integrated circuits x| Masks x| Measurement.
    650
      
    0
    a| Chromium x| Spectra x| Standards.
    710
    2
      
    a| National Institute of Standards and Technology (U.S.)
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    a| tmp97116108
    999
      
      
    a| C 13.10:260-129 w| SUDOC i| 2804964-1001 l| 3EAST m| ALDERMAN t| MICROFICHE
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