Item Details

Print View

Dopant Incorporation Efficiency in CVD Silicon Carbide Epilayers [microform]

D.J. Larkin
Format
Book; Government Document; Microform
Published
[Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1996]
Language
English
Series
NASA-TM
NASA Technical Memorandum
SuDoc Number
NAS 1.15:112756
Description
1 v.
Notes
Shipping list no.: 98-0613-M.
Reproduction Notes
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1997] 1 microfiche.
Series Statement
NASA-TM ; 112756
NASA technical memorandum 112756
Technical Details
  • Access in Virgo Classic
  • Staff View

    LEADER 01381nam a22003857a 4500
    001 u2799175
    003 SIRSI
    005 19991213135003.0
    008 991213s1996 dcu b f000 0 eng d
    035
      
      
    a| (Sirsi) tmp97212182
    035
      
      
    a| (OCoLC)42996198
    037
      
      
    a| 19970019642 b| NASA
    040
      
      
    a| GPO c| GPO d| DLC d| MvI
    049
      
      
    a| VAMM
    074
      
      
    a| 0830-D (MF)
    086
    0
      
    a| NAS 1.15:112756
    100
    1
      
    a| Larkin, D. J.
    245
    1
    0
    a| Dopant incorporation efficiency in CVD silicon carbide epilayers h| [microform] / c| D.J. Larkin.
    260
      
      
    a| [Washington, DC : b| National Aeronautics and Space Administration ; a| Springfield, Va. : b| National Technical Information Service, distributor, c| 1996]
    300
      
      
    a| 1 v.
    490
    1
      
    a| NASA-TM ; v| 112756
    500
      
      
    a| Shipping list no.: 98-0613-M.
    533
      
      
    a| Microfiche. b| [Washington, D.C. : c| National Aeronautics and Space Administration, d| 1997] e| 1 microfiche.
    596
      
      
    a| 2
    650
      
    7
    a| Vapor deposition. 2| nasat
    650
      
    7
    a| Silicon carbides. 2| nasat
    650
      
    7
    a| Epitaxy. 2| nasat
    650
      
    7
    a| Additives. 2| nasat
    830
      
    0
    a| NASA technical memorandum v| 112756.
    710
    1
      
    a| United States. b| National Aeronautics and Space Administration.
    900
      
      
    a| tmp97212182
    999
      
      
    a| NAS 1.15:112756 w| SUDOC i| X005032680 l| 3EAST m| ALDERMAN t| MICROFICHE
▾See more
▴See less

Availability

Google Preview

Google Books Preview
Library Location Map Availability Call Number
Alderman 3rd Floor East Reading Room N/A Available Non-Circ.