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The Science and Engineering of Microelectronic Fabrication

Stephen A. Campbell
Format
Book
Published
New York : Oxford University Press, 1996.
Language
English
Series
Oxford Series in Electrical Engineering
ISBN
0195105087 (cl)
Description
xv, 536 p. : ill. ; 25 cm.
Notes
Includes bibliographical references and index.
Technical Details
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    a| xv, 536 p. : b| ill. ; c| 25 cm.
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