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Introduction to Microlithography

edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden
Format
Book
Published
Washington, DC : American Chemical Society, 1994.
Edition
2nd ed
Language
English
Series
ACS Professional Reference Book
ISBN
0841228485 (alk. paper)
Contents
  • An introduction to lithography / Larry F. Thompson
  • The lithographic process / Murrae J. Bowden
  • Organic resist materials / C. Grant Willson
  • Resist processing / Larry Thompson
  • Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil.
Description
xiv, 527 p. : ill. ; 24 cm.
Notes
Includes bibliographical references and index.
Technical Details
  • Access in Virgo Classic
  • Staff View

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    a| TR940 b| .I57 1994
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    a| Introduction to microlithography / c| edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden.
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    a| 2nd ed.
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    a| Washington, DC : b| American Chemical Society, c| 1994.
    300
      
      
    a| xiv, 527 p. : b| ill. ; c| 24 cm.
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    0
    a| ACS professional reference book
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    a| Includes bibliographical references and index.
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    0
      
    a| An introduction to lithography / Larry F. Thompson -- The lithographic process / Murrae J. Bowden -- Organic resist materials / C. Grant Willson -- Resist processing / Larry Thompson -- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil.
    596
      
      
    a| 7
    650
      
    0
    a| Microlithography v| Congresses.
    650
      
    0
    a| Photoresists v| Congresses.
    650
      
    0
    a| Plasma etching v| Congresses.
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    0
    a| Semiconductors x| Etching v| Congresses.
    700
    1
      
    a| Thompson, L. F., d| 1944-
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    a| Willson, C. G. q| (C. Grant), d| 1939-
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    a| TR940 .I57 1994 w| LC i| X002758270 l| STACKS m| CHEMISTRY t| BOOK
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