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Ultraclean Semiconductor Processing Technology and Surface Chemical Cleaning and Passivation: Symposium Held April 17-19, 1995, San Francisco, California, U.S.A.

editors, Michael Liehr ... [et al.]
Format
Book
Published
Pittsburgh, PA : Materials Research Society, 1995.
Language
English
Series
Materials Research Society Symposium Proceedings
Materials Research Society Symposia Proceedings
ISBN
1558992898 (alk. paper)
Description
xiii, 411 p. : ill. ; 24 cm.
Notes
Includes bibliographical references and index.
Series Statement
Materials Research Society symposium proceedings, 0272-9172 ; vol. 386
Materials Research Society symposia proceedings vol. 386
Technical Details
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    a| Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : b| symposium held April 17-19, 1995, San Francisco, California, U.S.A. / c| editors, Michael Liehr ... [et al.].
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    a| Pittsburgh, PA : b| Materials Research Society, c| 1995.
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    a| xiii, 411 p. : b| ill. ; c| 24 cm.
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    a| Materials Research Society symposium proceedings, x| 0272-9172 ; v| vol. 386
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    a| Includes bibliographical references and index.
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    a| Integrated circuits x| Design and construction v| Congresses.
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    a| Manufacturing processes x| Cleaning v| Congresses.
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    a| Liehr, Michael.
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    a| Materials Research Society symposia proceedings v| vol. 386.
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    a| TK7874 .U373 1995 w| LC i| X002240050 l| STACKS m| SCI-ENG t| BOOK
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