Item Details

Bright-Chromium Linewidth Standard, SRM 476, for Calibration of Optical Microscope Linewidth Measuring Systems

Carol F. Vezzetti, Ruth N. Varner, James E. Potzick
Format
Book; Government Document
Published
Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1991.
Language
English
Related Title
Bright chromium linewidth standard, SRM 476, for calibration of optical microscope linewidth measuring systems.
Series
Standard Reference Materials
NIST Special Publication
SuDoc Number
C 13.10:260-114
Description
xii, 33 p. : ill. ; 28 cm.
Notes
  • Distributed to depository libraries in microfiche.
  • No longer available for sale by the Supt. of Docs.
  • "Issued January 1991."
  • Includes bibliographical references (p. 11-12).
Series Statement
NIST special publication ; 260-114
Technical Details
  • Access in Virgo Classic

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    a| Bright-chromium linewidth standard, SRM 476, for calibration of optical microscope linewidth measuring systems / c| Carol F. Vezzetti, Ruth N. Varner, James E. Potzick.
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    a| Gaithersburg, MD : b| U.S. Dept. of Commerce, National Institute of Standards and Technology, c| 1991.
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    a| xii, 33 p. : b| ill. ; c| 28 cm.
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    0
    a| Standard reference materials
    440
      
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    a| NIST special publication ; v| 260-114
    500
      
      
    a| Distributed to depository libraries in microfiche.
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    a| No longer available for sale by the Supt. of Docs.
    500
      
      
    a| "Issued January 1991."
    504
      
      
    a| Includes bibliographical references (p. 11-12).
    513
      
      
    a| Final.
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    a| Microscopes x| Calibration x| Standards.
    650
      
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    a| Integrated circuits x| Masks x| Measurement.
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    a| Chromium x| Spectra x| Standards.
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    a| Varner, Ruth N.
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    a| Potzick, James E.
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    a| Bright chromium linewidth standard, SRM 476, for calibration of optical microscope linewidth measuring systems.
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