Item Details

Antireflecting-Chromium Linewidth Standard, SRM 473, for Calibration of Optical Microscope Linewidth Measuring Systems [microform]: Standard Reference Materials

Carol F. Vezzetti, Ruth N. Varner, James E. Potzick
Format
Book; Government Document; Microform
Published
Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; [Springfield, VA : Order from National Technical Information Service, 1992]
Language
English
Related Title
Standard reference materials.
Antireflecting chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems.
Series
NIST Special Publication
SuDoc Number
C 13.10:260-119
Description
1 v.
Notes
  • Distributed to depository libraries in microfiche.
  • Shipping list no.: 92-2587-M.
Reproduction Notes
Microfiche. [Washington, D.C.?] : Supt. of Docs., U.S. G.P.O., [1992] 1 microfiche : negative.
Series Statement
NIST special publication ; 260-117
Technical Details
  • Access in Virgo Classic

  • LEADER 01772nam a22003977a 4500
    001 u2116869
    003 SIRSI
    008 930310s1992 mdu b f000 0 eng d
    027
      
      
    a| NIST/SP-260/119
    035
      
      
    a| (Sirsi) o27701163
    035
      
      
    a| (OCoLC)27701163
    035
      
      
    a| (GPO)93069811
    040
      
      
    a| GPO c| GPO d| DLC
    049
      
      
    a| VAMM
    074
      
      
    a| 0247 (MF)
    086
    0
      
    a| C 13.10:260-119
    100
    1
      
    a| Vezzetti, Carol F.
    245
    1
    0
    a| Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems h| [microform] : b| standard reference materials / c| Carol F. Vezzetti, Ruth N. Varner, James E. Potzick.
    260
      
      
    a| Gaithersburg, MD : b| U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; a| [Springfield, VA : b| Order from National Technical Information Service, c| 1992]
    300
      
      
    a| 1 v.
    440
      
    0
    a| NIST special publication ; v| 260-117
    500
      
      
    a| Distributed to depository libraries in microfiche.
    500
      
      
    a| Shipping list no.: 92-2587-M.
    533
      
      
    a| Microfiche. b| [Washington, D.C.?] : c| Supt. of Docs., U.S. G.P.O., d| [1992] e| 1 microfiche : negative.
    596
      
      
    a| 2
    650
      
    0
    a| Microscopes x| Calibration x| Standards.
    650
      
    0
    a| Integrated circuits x| Masks x| Measurement.
    650
      
    0
    a| Chromium x| Spectra x| Standards.
    700
    1
      
    a| Varner, Ruth N.
    700
    1
      
    a| Potzick, James E.
    740
    0
      
    a| Standard reference materials.
    740
    0
      
    a| Antireflecting chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems.
    710
    2
      
    a| National Institute of Standards and Technology (U.S.)
    999
      
      
    a| C 13.10:260-119 w| SUDOC i| 2116869-1001 l| 3EAST m| ALDERMAN t| MICROFICHE

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