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Evaluation of a CMOS/SOS Process Using Process Validation Wafers

J.S. Suehle, L.W. Linholm, and G.M. Marshall ; prepared for Defense Nuclear Agency
Format
Book; Government Document
Published
Washington, DC : U.S. Dept. of Commerce, National Bureau of Standards ; [Springfield, VA : National Technical Information Service, distributor, 1982]
Language
English
Related Title
Evaluation of a C.M.O.S./S.O.S. process using process validation wafers.
Series
NBSIR
SuDoc Number
C 13.58:82-2514
Description
iv, 42 p. : ill. ; 28 cm.
Notes
  • "June 1982."
  • Includes bibliographical references.
Series Statement
NBSIR ; 82-2514
Technical Details
  • Access in Virgo Classic
  • Staff View

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Library Location Map Availability Call Number
Alderman 3rd Floor East Reading Room N/A Available Non-Circ.