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Evaluation of a CMOS/SOS Process Using Process Validation Wafers

J.S. Suehle, L.W. Linholm, and G.M. Marshall ; prepared for Defense Nuclear Agency
Format
Book; Government Document
Published
Washington, DC : U.S. Dept. of Commerce, National Bureau of Standards ; [Springfield, VA : National Technical Information Service, distributor, 1982]
Language
English
Related Title
Evaluation of a C.M.O.S./S.O.S. process using process validation wafers.
Series
NBSIR
SuDoc Number
C 13.58:82-2514
Description
iv, 42 p. : ill. ; 28 cm.
Notes
  • "June 1982."
  • Includes bibliographical references.
Series Statement
NBSIR ; 82-2514
Technical Details
  • Access in Virgo Classic
  • Staff View

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    a| (OCoLC)9607876
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    a| Suehle, J. S. q| (John S.)
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    a| Evaluation of a CMOS/SOS process using process validation wafers / c| J.S. Suehle, L.W. Linholm, and G.M. Marshall ; prepared for Defense Nuclear Agency.
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    a| Washington, DC : b| U.S. Dept. of Commerce, National Bureau of Standards ; a| [Springfield, VA : b| National Technical Information Service, distributor, c| 1982]
    300
      
      
    a| iv, 42 p. : b| ill. ; c| 28 cm.
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    a| "June 1982."
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    a| Includes bibliographical references.
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    a| 2
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    a| Integrated circuits.
    650
      
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    a| Semiconductor wafers.
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    a| Process control.
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    a| Linholm, Loren W.
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    a| Marshall, Glenn.
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    a| Evaluation of a C.M.O.S./S.O.S. process using process validation wafers.
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    a| C 13.58: 82-2514 w| SUDOC i| 1504358-1001 l| 3EAST m| ALDERMAN t| MICROFICHE
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