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Production-Compatible Microelectronic Test Structures for the Measurement of Interface State Density and Neutral Trap Density

T.J. Russell ; prepared for Air Force Wright Aeronautical Laboratories and Naval Air Systems Command
Format
Book; Government Document
Published
Washington, DC : U.S. Dept. of Commerce, National Bureau of Standards ; [Springfield, VA : National Technical Information Service, distributor, 1982]
Language
English
Series
NBSIR
SuDoc Number
C 13.58:81-2413
Description
iv, 36 p. : ill. ; 28 cm.
Notes
  • "January 1982."
  • Includes bibliographical references.
Series Statement
NBSIR ; 81-2413
Technical Details
  • Access in Virgo Classic
  • Staff View

Availability

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Alderman 3rd Floor East Reading Room N/A Available Non-Circ.