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Production-Compatible Microelectronic Test Structures for the Measurement of Interface State Density and Neutral Trap Density

T.J. Russell ; prepared for Air Force Wright Aeronautical Laboratories and Naval Air Systems Command
Format
Book; Government Document
Published
Washington, DC : U.S. Dept. of Commerce, National Bureau of Standards ; [Springfield, VA : National Technical Information Service, distributor, 1982]
Language
English
Series
NBSIR
SuDoc Number
C 13.58:81-2413
Description
iv, 36 p. : ill. ; 28 cm.
Notes
  • "January 1982."
  • Includes bibliographical references.
Series Statement
NBSIR ; 81-2413
Technical Details
  • Access in Virgo Classic
  • Staff View

    LEADER 01458cam a2200361 a 4500
    001 u1502907
    003 SIRSI
    008 830520s1982 dcua b f00010 eng d
    035
      
      
    a| (Sirsi) o09528296
    035
      
      
    a| (OCoLC)09528296
    035
      
      
    a| (GPO)83016777
    035
      
      
    a| (OCoLC)9528296
    040
      
      
    a| GPO c| GPO
    049
      
      
    a| VA@D
    074
      
      
    a| 247-D (microfiche)
    086
    0
      
    a| C 13.58:81-2413
    100
    1
      
    a| Russell, T. J. q| (Thomas James), d| 1943-
    245
    1
    0
    a| Production-compatible microelectronic test structures for the measurement of interface state density and neutral trap density / c| T.J. Russell ; prepared for Air Force Wright Aeronautical Laboratories and Naval Air Systems Command.
    260
      
      
    a| Washington, DC : b| U.S. Dept. of Commerce, National Bureau of Standards ; a| [Springfield, VA : b| National Technical Information Service, distributor, c| 1982]
    300
      
      
    a| iv, 36 p. : b| ill. ; c| 28 cm.
    440
      
    0
    a| NBSIR ; v| 81-2413
    500
      
      
    a| "January 1982."
    504
      
      
    a| Includes bibliographical references.
    596
      
      
    a| 2
    650
      
    0
    a| Microelectronics.
    650
      
    0
    a| Oxides x| Thermal properties.
    650
      
    0
    a| Electric charge and distribution.
    710
    2
      
    a| Air Force Wright Aeronautical Laboratories.
    710
    1
      
    a| United States. b| Naval Air Systems Command.
    710
    1
      
    a| United States. b| National Bureau of Standards.
    999
      
      
    a| C 13.58: 81-2413 w| SUDOC i| 1502907-1001 l| 3EAST m| ALDERMAN t| MICROFICHE
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