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Semiconductor Measurement Technology: Notes on SEM Examination of Microelectronic Devices

John R. Devaney, K. O. Leedy and W. J. Keery
Format
Book; Government Document
Published
Washington : Dept. of Commerce, National Bureau of Standards, Institute for Applied Technology, Electronic Technology Division : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1977.
Language
English
Related Title
Notes on SEM examination of microelectronic devices.
Series
NBS Special Publication
Description
iv, 48, [1] p. : ill. ; 26 cm.
Notes
  • CODEN: XNBSAV
  • Work performed at Hi-Rel Laboratories under Contract 4-35897 in cooperation with the Electronics Technology Division.
  • Jointly supported by Defense Advanced Research Projects Agency and National Bureau of Standards.
  • Issued April 1977.
  • Bibliography: p. 47-48.
Series Statement
NBS special publication ; 400-35
Technical Details
  • Access in Virgo Classic
  • Staff View

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    a| Work performed at Hi-Rel Laboratories under Contract 4-35897 in cooperation with the Electronics Technology Division.
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    a| Jointly supported by Defense Advanced Research Projects Agency and National Bureau of Standards.
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    a| Miniature electronic equipment x| Testing.
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    a| Scanning electron microscopes x| Technique.
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