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Semiconductor Measurement Technology: Techniques for Measuring the Integrity of Passivation Overcoats on Integrated Circuits

Werner Kern and Robert B. Comizzoli ; RCA Laboratories
Format
Book; Government Document
Published
Washington : Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1977.
Language
English
Related Title
Techniques for measuring the integrity of passivation overcoats on integrated circuits.
Series
NBS special publication
Description
xiv, 105 [1] p. : ill. ; 26 cm.
Notes
  • CODEN: XNBSAV
  • Work performed at RCA Laboratories, Princeton, N. J. under contract NBS5-35913.
  • Supported by Defense Advance Research Projects Agency and National Bureau of Standards.
  • Issued March 1977.
  • Bibliography p. 103-105.
Series Statement
NBS special publication ; 400-31
Technical Details
  • Access in Virgo Classic
  • Staff View

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