Item Details

Influence of the Deposition Conditions on Radiofrequency Magnetron Sputtered MoS₂ Films

Pierre A. Steinmann and Talivaldis Spalvins
Format
Book; Government Document; Online; EBook
Published
Washington, D.C. : National Aeronautics and Space Administration, Office of Management, Scientific and Technical Information Division ; Springfield, Va. : For sale by the National Technical Information Service, 1990.
Language
English
Series
NASA Technical Paper
Description
7 p. : ill. ; 28 cm.
Mode of access: Internet.
Notes
  • Prepared at Lewis Research Center.
  • Bibliography: p. 3.
Series Statement
NASA technical paper ; 2994
Logo for Copyright Not EvaluatedCopyright Not Evaluated
Technical Details

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    a| Influence of the deposition conditions on radiofrequency magnetron sputtered MoS₂ films / c| Pierre A. Steinmann and Talivaldis Spalvins.
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    a| NASA technical paper ; v| 2994
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    a| Bibliography: p. 3.
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    a| Mode of access: Internet.
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    a| Sputtering (Physics)
    650
      
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    a| Molybdenum compounds.
    650
      
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    a| Coatings.
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    a| Lubrication and lubricants.
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